Wafer Bonding and Strained-Layer Silicon

نویسندگان

  • Ulrich Goesele
  • Silke Christiansen
چکیده

s of the Invited Presentations Vienna University of Technology April 10 and 11, 2003 Society for Microelectronics Vienna, 2003 Society for Microelectronics c/o Institute of Industrial Electronics and Material Science Vienna University of Technology Gusshausstraße 27–29/366 A-1040 Vienna, Austria

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تاریخ انتشار 2003